Development of Part Insertion Technique by Capacitance Measurement.
نویسندگان
چکیده
منابع مشابه
Investigation of Interconnect Capacitance Characterization using Charge-Based Capacitance Measurement (CBCM) Technique and 3-D Simulation
This paper examines the recently introduced Charge-Based Capacitance Measurement (CBCM) technique through use of a 3-D interconnect simulator. This method can be used in conjunction with simulation at early process development stages to provide designers with accurate parasitic interconnect capacitances. Metal to substrate, interwire, and interlayer capacitances are each discussed and overall c...
متن کاملInvestigation of Interconnect Capacitance Characterization Using Charge-Based Capacitance Measurement (CBCM) Technique and Three-Dimensional Simulation
This paper examines the recently introduced chargebased capacitance measurement (CBCM) technique through use of a three-dimensional (3-D) interconnect simulator. This method can be used in conjunction with simulation at early process development stages to provide designers with accurate parasitic interconnect capacitances. Metal to substrate, interwire, and interlayer capacitances are each disc...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1994
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.60.1102